Semiconductor & materials inspection
LMI MET-100i
A high-efficiency reflected-light metallurgical microscope for semiconductor, wafer, flat-panel display and opaque-material inspection.
- Bright field, dark field, polarization and DIC observation
- Infinity color-corrected optical system
- Large mechanical stage for wafer and FPD inspection
- Camera-ready trinocular viewing configuration
ObservationBF / DF / POL / DIC
Optical systemInfinity color corrected
Objective range5X to 100X
Camera adapter0.5X / 0.65X / 1X
Technical information
MET-100i specifications
Configure the platform for wafer, FPD, PCB, circuit-package, metal, ceramic and precision-surface inspection.
Optical system
Infinity color-corrected optical system.
Observation methods
Bright field, dark field, polarization and Nomarski differential interference contrast (DIC).
Viewing head
Trinocular viewing options with 50-76 mm interpupillary adjustment. Available configurations include a 0-35° tilting erect-image head and 30° inclined heads with selectable camera/eyepiece splitting ratios.
Eyepieces
High-eye-point wide-field plan eyepieces: PL10X/25 mm or PL10X/26.5 mm, with diopter adjustment and reticle support.
Objectives
Bright/dark-field semi-apochromatic DIC objectives from 5X to 100X, with long-working-distance 20X, 50X and 100X options.
Nosepiece
High-precision quintuple, sextuple or septuple nosepiece configurations with DIC slot; electronic sextuple option available.
Focus mechanism
Low-position coaxial focusing with upper limit and tension adjustment; 33-35 mm coarse range and 0.001 mm fine precision.
Stage options
6-inch, 8-inch and 12-inch inspection-stage configurations. Mechanical stages include low-position coaxial controls and clutch-assisted quick movement; electronic stage option supports automated X/Y positioning.
Illumination
Bright/dark-field reflected illuminator with electronic variable aperture and field diaphragm, center adjustment, filter slots and polarizing-kit support.
Camera integration
0.5X, 0.65X and 1X C-mount camera adapters.
Accessories
Polarizing kit, interference filters, high-precision micrometer and DIC attachment.